High-Throughput Screening of Optimal Process Parameters for PVD TiN Coatings With Best Properties Through a Combination of 3-D Quantitative Phase-Field Simulation and Hierarchical Multi-Objective Optimization Strategy

Physical vapor deposition (PVD) is one of the most important techniques for coating fabrication. With traditional trial-and-error approach, it labor-intensive and challenging to determine optimal process parameters PVD coatings with best properties. A combination three-dimensional (3-D) quantitative phase–field simulation a hierarchical multi-objective optimization strategy was, therefore, developed perform high-throughput screening successfully applied technically TiN coatings. Large amounts 3-D phase-field simulations growth during were first carried out acquire parametric relation among model parameters, microstructures, various Experimental data then used validate numerical results reveal correlation between parameters. After that, method was proposed design multiple properties based on key experimental data. Marginal utility subsequently examined identification Pareto fronts in terms combinations objectives. The windows were, filtered respect model/process manner. Finally, consistent result found against results.